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The choice for advanced process and characterization needs. The Agilent 4073A ultra advanced parametric tester with Agilent SPECS is designed to perform highly precise DC measurement, capacitance measurement, flash memory cell testing, and testing of other high-frequency applications. The system supports up to eight source monitor units (SMUs), two of which may be high-resolution SMUs (HRSMUs), and two of which may be high-power SMUs (HPSMUs). Each SMU is self-calibrating and may be individually configured to force either current or voltage and simultaneously measure either voltage or current.
Supports up to 2xHPSMU, up to 2xHRSMU, and up to 8 total SMUs
Low-leakage switching matrix, customizable from 12 to 48 fully-guarded Kelvin outputs
High-frequency switching matrix with integrated pulse generator control
8 auxiliary inputs and 48 extended path inputs for support of external instruments
2 microvolt and 1 femtoamp measurement resolution (HRSMU)
+/- 200 Volts and +/- 1 Amp output capability (HPSMU)
1 kHz to 1 MHz capacitance frequency measurement range (using 4284A or E4980A)
+/- 1.6 Amp ground unit (GNDU)
HV-SPGU option measurement capabilities
+/-40 V output (80 V peak-to-peak) at high impedance
Pulse rise and fall times as fast as 20 ns
Three-level output pulse capability
Arbitrary Linear Waveform Generation (ALWG) function