The 4076 meets the DC parametric, RF parametric, high frequency CV and pulsed IV measurement requirements necessitated by 65 nanometer (and below) technologies in a production test environment. Covers from DC to RF Supports S parameter measurement Supports thin gate dielectric capacitance measurement (HFCV/RFCV) Supports SOI and high-k dielectric measurement (Pulsed IV) For dc measurement capabilities, see 4073A/B Up to 20 GHz S parameter measurement range. Up to 110 MHz HFCV and up to 8.5 GHz RFCV measurement Pulsed IV as fast as 10 ns width.
HV-SPGU Option Measurement Capabilities
+/-40 V output (80 V peak-to-peak) at high impedance Pulse rise and fall times as fast as 20 ns Three-level output pulse capability Arbitrary Linear Waveform Generation (ALWG) function